Crystallization of Amorphous Silicon Films Using Joule Heating
نویسندگان
چکیده
منابع مشابه
Polycrystalline Silicon Produced by Joule-Heating Induced Crystallization
An electric field was applied to a conductive layer to induce Joule heating in order to generate the intense heat needed to carry out the crystallization of amorphous silicon. Complete crystallization was observed via Joule heating under typical processing conditions. Crystallization was accomplished throughout the sample within the range of microseconds of the heating, thus demonstrating the p...
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ژورنال
عنوان ژورنال: Journal of the Korean institute of surface engineering
سال: 2014
ISSN: 1225-8024
DOI: 10.5695/jkise.2014.47.1.020